氮化硼电子束坩埚

基本信息

项目 参数说明
产品名称 氮化硼电子束坩埚(Boron Nitride E-Beam Crucible)
材质 热压氮化硼(Hot Pressed Boron Nitride,HPBN)
纯度 ≥99.5% BN
使用温度 ≤2000°C(在惰性气氛或真空中)
尺寸 可按需定制孔径、厚度、深度及结构
常见形状 圆柱形、台阶形、椭圆形、多孔型、镶嵌式
适配系统 用于电子束蒸发镀膜设备(E-Beam Evaporators)
导热性 中等导热性,热稳定性高
电绝缘性 绝缘体,防止电子束偏移

描述

产品描述

氮化硼电子束坩埚采用热压工艺制成,具有优异的耐高温性能、电绝缘性、化学稳定性和润滑性,特别适合用于电子束蒸发(E-beam evaporation)过程中对高纯金属、氧化物、氟化物等材料的精密蒸发镀膜。

与石墨坩埚相比,BN坩埚不会在高温下释放气体或与被蒸发材料发生反应,适用于对污染控制要求更高的应用场景。


应用领域

氮化硼电子束坩埚广泛应用于以下高端工艺中:

  • 光学镀膜:如蒸发TiO₂、MgF₂、Al₂O₃等,用于制造抗反射膜、滤光片、增透膜等

  • 半导体材料制备:如Ga、In、Ge等金属材料的高纯蒸发

  • 太阳能薄膜:如透明导电膜(ITO、AZO)蒸镀过程中用于隔离与蒸发

  • 磁性薄膜制造:蒸发NiFe、Co、Gd等用于磁存储器件

  • 功能陶瓷沉积:如氧化锌、氮化铝等陶瓷靶材蒸发沉积


产品优势

  • 化学惰性强:与几乎所有熔融金属和氧化物不发生反应

  • 绝缘性优越:防止电子束短路或能量偏移

  • 抗热震性好:多次高温加热/冷却不裂

  • 高纯无污染:避免对蒸发材料造成杂质污染

  • 易于机加工:可按需设计多孔、多台阶、插装式结构


可定制结构类型

  • 单孔型(常规材料蒸发)

  • 多孔型(多材料共蒸发)

  • 阶梯型/套装型(嵌入铜坩埚或水冷座)

  • 薄壁型/深腔型(适配不同功率电子束枪)


包装方式

每只氮化硼电子束坩埚均采用无尘泡棉袋封装,外部加设防震缓冲材料,并装入加固纸箱或木箱,以确保运输过程中的产品安全与清洁。

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常见问题

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.