微电子盒式蒸发源

概述

在选择加热器形状时,应考虑所需加热区域的大小以及所处理材料的类型。这些舟式加热器可用于多次加热相同的材料。

盒式

Baffled Box (SiO-Capacity 2g)

BB1

#091: Tantalum, 1.45 Volt, 266 Amps, 386 Watts, 1600°C Temp 

 

Box (#092)

BB2

#092: Tantalum, 2.52 Volt, 141 Amps, 355 Watts, 1600°C Temp. 

 

Box (#093)

BB3
#093: Tantalum, 1.87 Volt, 196 Amps, 367 Watts, 1600°C Temp.
 

覆盖形

Holed Cover (For #092)

C1
#094: Tantalum

Holed Cover (For #093)

C2
#095: Tantalum

Sieve Cover (For #092)

C3
#096: Tantalum

Sieve Cover (For #093)

C4
#097: Tantalum